Catalogue
Product name: Prime grade silicon wafers, diameter 100mm
ITEM | Test-Mp1 |
Silicon Wafers Specification | |
Diameter | 100 mm |
Diamater tol. | 0.3 mm |
Layer Thickness | 3,00 Å ±10% |
Coating | Wet Thermal Oxide |
Grade | Prime |
Growth | CZ |
Type | P |
Dopamt | B |
Orientation | <100> ±0.5° |
Resistivity | 0.005-0.001 Ohm*cm/ 10-20 Ohm*cm |
Thickness | About 525      μm |
Thickness tol. | 20 μm |
Finish | Single Side Polished |
Flats | 2 Flats. SEMI-Std. |
TTV | 5 μm |
Bow | 30 μm |
Warp | 30 μm |
Particles (@0.16 μm ) | / |
Particles (@0.2 μm ) | / |
Particles (@0.3 μm ) | <20 |
Particles (@0.5μm ) | / |
Oxygen Content | 1.6 x 10^18 atoms/cm3 |
Carbon Content | 0.5 ppm |
Thermal Expansion Coefficient | 2.6·10-6°C-1 |
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